Table 3 Output characteristics of the sensor chip

From: Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Temperature (°C)

Sensitivity (mV/V/MPa)

TCS (FS/°C)

TCO (FS/°C)

Linearity (%FS)

Hysteresis (%FS)

Accuracy (%FS)

−50

3.38

−0.073%

−0.45%

0.77

0.14

1.03

25

3.18

/

/

0.1

0.28

0.56

300

2.4

−0.067%

−0.037%

1.94

0.77

2.18

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