Table 4 Performance summary and comparison of different sensors
References | Piezoresistors doping type | Maximum output test temperature (°C) | Output Repeat test (Yes or No) | Sensitivity (mV/V/MPa) | Pressure range (MPa) |
|---|---|---|---|---|---|
N type 4H-SiC | 150 | No | 8.59 mV/mA/MPa | 7 | |
N type 4H-SiC | 25 | No | 2.68 | 6 | |
N type 6H-SiC | 400 | No | 0.4 | 12 | |
P type 4H-SiC | 25 | No | 10.9 | 1 | |
N type 4H-SiC | 250 | No | 1.56 | 5 | |
This work | N type 4H-SiC | 300 | Yes | 3.38 | 2 |
