Fig. 3: Tunable power couplers and switches.
a 3-D schematic view of an out-of-plane actuated tunable power coupler indicating the input, through, and drop ports and the actuator. b SEM recording of the released device showing a cleanly suspended and initially well-aligned configuration of the couplers in the unactuated state. c Measurement results for the spectral characteristics of the tunable power coupler under DC actuation showing a maximum extinction ratio of 25 dB between the drop and through ports in the unactuated (0 V) state and a maximum extinction ratio of 30 dB in the actuated (27 V) state. The associated 3-dB bandwidth of this device is >30 nm. d 3-D schematic view of an in-plane actuated photonic 1 × 2 switch with the movable input and two fixed outputs. e SEM recording of the released device showing the curved electrodes, stoppers, and suspended waveguides. f Measurement results for the spectral characteristics of the device in all three functional states: ON1, OFF, and ON2, wherein the extinction ratio is >23 dB for both ON states and the bandwidth is >70 nm59
