Fig. 1: Structural design and working principle of the MEMS differential thermopile H2 sensor. | Microsystems & Nanoengineering

Fig. 1: Structural design and working principle of the MEMS differential thermopile H2 sensor.

From: 1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles

Fig. 1

a Schematic diagram of the MEMS differential thermopile-based H2 sensor, consisting of a sensing thermopile and a reference thermopile. b Schematic diagram of the H2 sensing mechanism and working principle of the sensor. The differential output signal is proportional to the temperature change due to the H2 catalytic reaction process, while environmental interferences are subtracted

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