Fig. 4: Temperature response of the MEMS differential thermopiles. | Microsystems & Nanoengineering

Fig. 4: Temperature response of the MEMS differential thermopiles.

From: 1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles

Fig. 4

a Finite element modeling of the MEMS thermopiles considering electrical heating, heat transfer in the device, and convection in air. b Modeled temperature distribution in the sensing region of the thermopile, showing good uniformity (variation within ±1%). c Measured averaged temperature within the sensing region vs. the heating voltage, which is in good agreement with the simulation results. d Measured output voltage of a single thermopile vs. the averaged heating temperature within the sensing region, showing a temperature sensitivity of ~28 mV/°C

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