Fig. 1: Reconstructions of metal layers M3 (top row), M2 (middle row), and M1 (bottom row) using (left) MLEM and summing the energy bands from 4.9 keV to 5.9 keV and 9.2 keV to 9.5 keV with 100 iterations and 1 pixel Gaussian blur, (middle) using the TomoScatt code and the 9.1 keV to 10.1 keV band for the selected slices, comparison with the original GDS design (right). | Microsystems & Nanoengineering

Fig. 1: Reconstructions of metal layers M3 (top row), M2 (middle row), and M1 (bottom row) using (left) MLEM and summing the energy bands from 4.9 keV to 5.9 keV and 9.2 keV to 9.5 keV with 100 iterations and 1 pixel Gaussian blur, (middle) using the TomoScatt code and the 9.1 keV to 10.1 keV band for the selected slices, comparison with the original GDS design (right).

From: A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

Fig. 1

According to the GDS, the large L in the top panel is 3.46 μm × 0.71 μm and the facing corner piece is 1.26 μm × 1.16 μm. Those lines have a width of 0.20 μm. The scale bar is 2 μm. The features that dominate the reconstructions but do not appear in the GDS file are CMP fill, which are not a part of the GDS design file as they are added by the foundry. The thin red lines running in the southwest-to-northeast direction across M2 reconstructions (middle row, first and second columns) are used for the plot in Fig. 2

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