Fig. 1: Device description. | Microsystems & Nanoengineering

Fig. 1: Device description.

From: Impedance spectroscopy of the cell/nanovolcano interface enables optimization for electrophysiology

Fig. 1

a Top view and cross section of the device to scale. The nanovolcano is standing on top of a cavity whose floor is patterned with a platinum electrode covered by a layer of poly(3-4,ethylenedioxythiophene) polymer doped with polystyrene- sulfonate (PEDOT:PSS). b Device collapsed view showing the different layers to scale. From bottom to top: platinum electrode on fused silica substrate, PEDOT:PSS ring, polyimide insulation with cavity etched into it and SiO2 insulating layer into which the nanovolcano is patterned. c Optical micrograph of the platinum electrode before and after in situ electrodeposition of PEDOT:PSS. Although the electrode is enlarged, the nanovolcano is still readily imageable thanks to the ring geometry and the transparent fused silica substrate. d Scanning electron micrographs of the finished device viewed with a tilt. Nanovolcanoes of various heights and diameters were fabricated in this study

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