Fig. 6: PMUT applications.

a PMUTs as transmitters: (i) 32 element linear phased array for neuromodulation⁷³; (ii) annular phased array for HIFU⁷⁴; (iii) PMUTs for cell stimulation⁷⁵; (iv) PMUT phased array for bioheating⁷⁶; (v) PMUTs applied to acoustofluidics for particle streaming⁷⁷; (vi) PMUTs for directional ultrasound⁷⁸; (vii) near-ultrasound PMUTs for in-air communication⁷⁹; and (viii) PVDF PMUT arrays for in-air focusing⁷². b PMUTs as receivers: (i) PA system using PMUTs⁸¹ (ii) photoacoustic spectroscopy system for concentration detection⁸³; (iii) single-cell PMUT for low-frequency PA imaging⁸⁴; (iv) PMUTs operating at high modes for PA imaging application⁸⁵; (v) thick-film PMUTs for multifrequency imaging⁸⁶; (vi) neuromorphic object localization with PMUTs⁸⁹; (vii) PMUTs as zero-powered wake-up switches for communication⁹⁰; and (viii) broadband energy harvester using PMUT²⁵. c PMUTs as transceivers: (i) IVUS intracardiac imaging system using high-density PMUT arrays⁹²; (ii) 3D ultrasound on chip by using PMUTs with ASICs⁹³; (iii) PMUT microfluidic integration for fluid density sensing³⁰; (iv) single-cell PMUT on a chip for hydrodynamic property sensing¹⁰⁰; (v) TENG powered PMUTs for gas-sensing applications²⁸; (vi) in-air gesture recognition system by using AlN PMUTs¹⁰¹; (vii) AI-enabled PMUT integrated soft robotics¹⁰²; (viii) eye blinking system by using PMUTs¹⁰³; and (ix) PMUTs for intrabody communication³¹. All pictures have been adapted with permission