Table 2 Application classified PMUT performance comparison
From: Thin-film PMUTs: a review of over 40 years of research
Application category | Piezoelectric material | PMUT geometry | PMUT lateral dimensiona | PMUT stack thickness (st + ac) (μm)b | Array configuration | Operating frequency | Deflection sensitivity | Transmit Sensitivity | Receive/ Sensing Sensitivity | BWc @ -6 dB | Applied for |
|---|---|---|---|---|---|---|---|---|---|---|---|
Transmitter | PZT | Rectangular | (l × w): 8.3 mm × 680 μm | 5 + 1.5 | 32 channels, linear array | 1.4 MHz in water | – | 45.9 kPa/V, @ 20 mm (focused) | – | – | Phased array for neuromodulation73 |
AlN | Annular, concentric | w: 60 μm | 5 + 0.83 | 5 channels | 6 MHz in mineral oil | – | 12 kPa/V @ 1.9 mm (focused) | – | – | Proposed phased array for catheter HIFU74 | |
PZT | Circular | a: 120 μm | 3.7 + 1 | 10 × 29 channels | 1.5 MHz in culture medium | – | 30 kPa/V @ 1 mm (unfocused) | – | – | LIPUS for cell stimulation75 | |
PVDF | Circular | a: 250 μm | 10 + 0.45 | 22 annular channels | 229 kHz in air | – | 21 Pa/V @ 30 mm (focused) | – | – | Haptic feedback72 | |
PZT | Circular | a: 60 μm | 4 + 1.9 | – | 8 MHz in water | 40 nm/V @ 6.8 MHz | 1.9 kPa/V @ 7.5 mm (unfocused) | – | 62.5% | Particle manipulation77 | |
Receiver | PZT | Circular | a: 60 μm | 4 + 1.9 | 65 channels, Linear array | 6.75 MHz in water | – | 3.24 kPa/V @ 7.5 mm (unfocused) | 0.48 mV/kPa @ 0 dB gain | 89% | Photoacoustic imaging81 |
AlN | Circular | a: 92 μm | 1.45 + 1 | 10 × 10 channels | 700 kHz in air | – | – | – | – | Zero power ultrasound receiver90 | |
PZT | Rectangular | (l × w): 500 μm × 250 μm | 11 + 2 | Single channel | 285 kHz in water | – | – | 2 mV/mW/cm2 | 74% | Energy harvesting25 | |
Transceiver | PZT | Rectangular | (l × w): 110 μm × 80 μm | 6 + 1 | 512 channels, (32 × 16) | 5 MHz in tissue | – | – | – | 30% | Intravascular ultrasound92 |
AlN | Rectangular | (l × w): 58 μm × 43 μm | 1.2 + 1 | 6160 channels, (110 × 56) | 14 MHz in air | – | 625 Pa/V @ 250 μm (focused) | 344 μV/kPa | 33% in PDMS | 3D fingerprint sensor93 | |
PZT | Circular | a: 750 μm | 10 + 0.5 | 1 channel | 235 kHz in air | 1.5 μm/V | – | 0.56 mV/μm | – | Fluid density sensor30 | |
Single-crystal PZT | Circular | a: 1250 μm | 6.25 + 2 | 4 channels | 40–50 kHz in air | 10.75 μm/V | 0.4 Pa/V @ 33 cm (unfocused) | 2.8 mV/Pa | 11% | Long rangefinder40 | |
LiNbO3 | Rectangular | (l × w): 170 μm × 130 μm | 1.35 + 1 | 1 channel, (15 × 15) | 630 kHz in water | 80 nm/V in air | – | – | 64% | Intrabody communication31 |
