Fig. 1: Schematic illustration of the LSF robust micromirror design.
From: A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams
a Schematic 3D diagram of the LSF micromirror, which consists of a mirror plate, four actuators, and a substrate. b A top view of the LSF actuator, which consists of three multimorphs and two straight beams. Both ends of the actuator have PSPI anchors. c A cross-sectional view of the PSPI anchors connecting the actuators to the substrate. d A series of grooves are designed on the frame and substrate and filled with PSPI for better adhesion
