Table 1 The SAW humidity sensing characteristics based on different two-dimensional nanomaterials

From: Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

Materials

RH Meas. range

Res. Time

Rec. time

Ref.

BC

30%-93%

12 s

5 s

54

Go

15%-80%RH

9 s

9 s

19

SiO2

10%-70%RH

6 s

21.3 s

55

Go

20%-70%RH

9 s

12 s

20

ZnO/ZnO/Quartz

1%-80%RH

60 s

40 s

56

3DAG/PVA/SiO2

0%-90%RH

24 s

14.4 s

57

Go/MoS2

20%-95%RH

6.6 s

3.5 s

58

MMG

11%-95%RH

3.18 s

0.94 s

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