Table 2 Main geometric parameters of the designed cantilever microbeam
From: Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch
Components | Geometric parameters | Value (µm) |
|---|---|---|
Beam | Length L1 | 436 |
Length L2 | 114 | |
Thickness h | 3.3 | |
Depth b | 25 | |
Switches 1 and 2 | Gap x1 | 2 |
Gap x2 | 4 | |
Driving electrode | Length lE | 356 |
Air gap d | 4.8 | |
Mass dimensions | a1 | 10.5 |
a2 | 11.5 | |
a3 | 6.8 |
