Table 3 Material properties of silicon
From: Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch
Description | Parameter | Value |
|---|---|---|
Young’s modulus | E | 170 GPa |
Density of silicon | ρ | 2329 kg/m3 |
From: Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch
Description | Parameter | Value |
|---|---|---|
Young’s modulus | E | 170 GPa |
Density of silicon | ρ | 2329 kg/m3 |
