Fig. 18: Schematic diagram of the fabrication process.
From: Electron beam lithography on nonplanar and irregular surfaces
a First, the Al is first deposited; then, the PMMA film is coated; and finally, annealing is performed. b The bulk PMMA was washed away, leaving behind a monolayer brush. c The e-beam was exposed and developed. d Wet-etched Al. e Dry-etched substrate25. Reproduced with permission from Wiley-VCH (2016)
