Table 1 List of two mixtures used to etch a-Si34
From: Electron beam lithography on nonplanar and irregular surfaces
Recipe 1 | Recipe 2 | |
|---|---|---|
Pcoil (W) | 600 | 600 |
Pplaten (W) | 10 | 10 |
Pressure (mTorr) | 12 | 12 |
Gas (sccm) | SF6 (20) | SF6/Ar (15/5) |
Time (s) | 45 | 45 |
From: Electron beam lithography on nonplanar and irregular surfaces
Recipe 1 | Recipe 2 | |
|---|---|---|
Pcoil (W) | 600 | 600 |
Pplaten (W) | 10 | 10 |
Pressure (mTorr) | 12 | 12 |
Gas (sccm) | SF6 (20) | SF6/Ar (15/5) |
Time (s) | 45 | 45 |
