Fig. 2: Characterization and post-fabrication modification of microelectrodes. | Microsystems & Nanoengineering

Fig. 2: Characterization and post-fabrication modification of microelectrodes.

From: Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation

Fig. 2: Characterization and post-fabrication modification of microelectrodes.

a Released neural probe next to a penny for size comparison. b Tip of the neural probes, which includes 2 chemical sites and 16 recording microelectrodes, after the fabrication process and ready for post-processing. c Tip of the neural probes with PEDOT:PSS-coated recording microelectrodes. d SEM image of the probe shank with microelectrodes. The inset provides a higher magnification view of two electrodes, showcasing the difference before and after PEDOT coating. The rough morphology of the PEDOT coating is evident. e Bode plot, the impedance magnitude (mean ± SE, n = 128 microelectrodes) versus frequency before and after PEDOT:PSS coating. The impedance decreases significantly after PEDOT:PSS deposition. f Bode plot, the phase (mean ± SE, n = 128 microelectrodes) versus frequency before and after PEDOT:PSS coating. The microelectrodes after PEDOT:PSS deposition are capacitive in the low-frequency range and more resistive at higher frequencies. g CV plot for microelectrodes both before and after PEDOT coating

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