Fig. 2: Characterization of AlScN/ultrathin flexible glass.
From: Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence
a XRD pattern, b AFM image, and c cross-sectional SEM image of the AlScN film; d elemental maps, e XPS survey spectrum, and high-resolution spectra of (f) N1s and Sc2p of AlScN/ultrathin flexible glass; g scattering parameters of the AlScN/glass-based flexible SAW device
