Table 3 Comparison of different HFSs
From: High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing
Number | Materials | Tmax (°C) | Preparation process | Voltage (mV) | Sensitivity mV/(kW/m2) | Response time | Reference |
|---|---|---|---|---|---|---|---|
1 | ITO–In2O3 | 888 | Sputtering | 16 | 0.062 | No | |
2 | Pt/Pt–13Rh | 1000 | Sputtering | 1.1 | 0.0115 | 15.24 ms | |
3 | W–5Re W–26Re | 1000 | Sputtering | 4 | 0.0038 | No | |
4 | Pt/PtRh10 | 1200 | Screen printing | 1.41 | 0.0056 | No | |
5 | PSN2/TiB2 | 800 | 3D-printing | 250 | 1.349 | 0.9 s | |
6 | Si/Au | 1200 | DRIE | 60 | 0.0059 | 8 ms | |
7 | ITO/In2O3 | 1450 | Screen printing | 17.8 | 0.035 | 4.28 s | This study |
