Fig. 3: Sensing performance of the FBTS.

a Signal changes in the cilia subjected to external forces along different directions. b Sensitivity of the cilia under a compressive shear force. c Sensitivity of the cilia under a tensile shear force. d I–V curves from −1 to 1 V under different pressures. e Signal output curves toward forces with different frequencies. f Response of the FBTS toward a shear force of 2.4 mN. g Response of the sensors under different bending distances M to the cilia. h Response of the sensors under different touching distances D to the cilia. i Stability of the FBTS toward a shear force of 50 mN for 5000 cycles