Fig. 2: Resonance characteristics for another MoS2 NEMS resonator (Device S1) with a diameter of 2 μm, which is a singly-isolated resonator with a bilayer thickness and flat, smooth suspended material. | Microsystems & Nanoengineering

Fig. 2: Resonance characteristics for another MoS2 NEMS resonator (Device S1) with a diameter of 2 μm, which is a singly-isolated resonator with a bilayer thickness and flat, smooth suspended material.

From: Unveiling the tradeoff between device scale and surface nonidealities for an optimized quality factor at room temperature in 2D MoS2 nanomechanical resonators

Fig. 2

a False-colored SEM image of the resonator. Inset: optical image. b Zoomed-in false-colored SEM image of the resonator. Inset: AFM image. c PL spectrum showing high intensity. d Raman spectrum showing the difference between the E2g1 and A1g peaks at ~22.1 cm−1, corresponding to bilayer MoS2. Measured resonances (e) at varying VGS at a fixed vRF of 20 mV, with the amplitude shown in color scale, and (f) at varying vRF at a fixed VGS of 1 V, with the dynamic range of 77 dB extracted12. Representative resonance spectra at (g) VGS = 1 V and vRF = 1 mV, with a Q factor up to 3315 ± 115, and (h) VGS = 1 V and vRF = 20 mV, with a Q factor of 997 ± 21. Summary of extracted Q factors at varying (i) vRF and (j) VGS values and fitting to the strain-modulated dissipation model, with a δ of 0.007 extracted

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