Fig. 10: Piezoresistive pressure sensors and transducers.
From: Graphene MEMS and NEMS
a An optical micrograph of a suspended graphene membrane-based piezoresistive NEMS pressure sensor210. b SEM images of piezoresistive NEMS pressure sensors based on monolayer graphene suspended over an etched rectangular SiO2 cavity and an etched circular SiO2 cavity70. c Ultrasensitive room-temperature piezoresistive transduction in a graphene NEMS. This figure part shows a circuit diagram of the measurement setup, a finite element model, and an SEM image of a fabricated suspended H-shaped graphene resonator212. Figures reproduced with permission from refs. 70,210,212
