Fig. 11: Capacitive pressure sensors based on suspended graphene.

a A static capacitive pressure sensor using a single graphene drum²¹⁵. b A schematic of a capacitive pressure sensor array using suspended graphene‒polymer heterostructure membranes²¹³. c Sensitive capacitive pressure sensors based on suspended double-layer graphene/PMMA membrane arrays²¹⁶. d A schematic of a suspended graphene/PMMA acoustic capacitive sensor created by etching the SiO₂ sacrificial layer²¹⁷. Figures reproduced with permission from refs. ^{213,215,216,217}