Fig. 12: Resonant pressure sensors based on suspended graphene. | Microsystems & Nanoengineering

Fig. 12: Resonant pressure sensors based on suspended graphene.

From: Graphene MEMS and NEMS

Fig. 12

a A graphene squeeze-film pressure sensor96. b Graphene drums with low tension for electromechanical resonant pressure sensing219. Figures reproduced with permission from refs. 96,219

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