Fig. 14: Suspended graphene with an attached mass. | Microsystems & Nanoengineering

Fig. 14: Suspended graphene with an attached mass.

From: Graphene MEMS and NEMS

Fig. 14

a A schematic of a few-layer graphene cantilever with diamond-like carbon weights270. b A schematic of a kirigami pyramid made of suspended graphene supporting gold masses and an SEM image of the as-fabricated graphene kirigami pyramid271. c An SEM image of a graphene membrane supporting an SU-8 mass272. d Doubly clamped graphene ribbons with an attached silicon-proof mass as the transducer of the NEMS accelerometers135. e Fully clamped graphene membranes with attached silicon-proof mass as the transducer of NEMS accelerometers183. Figures reproduced with permission from refs. 135,183,270,271,272

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