Table 1 Relevant properties of graphene for MEMS and NEMS applications

Young’s modulus

1.02 TPa ²⁵⁹

1.02 TPa ⁵

Fracture strain

Up to 20% ³¹

Up to 30% ^5,319,320

Electrical conductivity

On SiO₂: 4050 cm²/Vs ⁴²

On h-BN: 350,000 cm²/Vs³²¹

Suspended: 15,000 cm²/Vs³²²

On SiO₂: 15,000 cm²/Vs²

On h-BN: 275,000 cm²/Vs; (T = RT): 120,000 cm²/Vs³²³

Suspended: 185,000 cm²/Vs³²⁴

Sheet resistance

72 Ω/sq³²⁵ Few hundred Ω/sq to > 10⁴ Ω/sq³²⁶

Few hundred Ω/sq to >10⁴ Ω/sq³²⁶

Thermal conductivity

Suspended: ~1500–5000 W/mK³²⁷

Suspended: ∼4840–5300 W/mK^328,329

Temperature coefficient of expansion

7 × 10⁻⁶ K^{−1 330}

7 × 10⁻⁶ K^{−1 331}

Permeability

Gases or ions might permeate grain boundaries or defects; therefore, multilayer CVD graphene is better³³²

Impermeable, even against helium³⁰

Gauge factor

3 (suspended drum)³⁴

>300 (nanographene films)⁵⁸

1.9 (suspended beam)⁶⁰

150 (on SiO₂)⁶⁷