Fig. 2: Characteristic curves from theoretical modeling. | Microsystems & Nanoengineering

Fig. 2: Characteristic curves from theoretical modeling.

From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity

Fig. 2

a Normalized force–deflection curve for the anti-spring mechanism. b Normalized axis force–deflection curves for the anti-spring mechanism. c Normalized stiffness–deflection curves for the anti-spring mechanism. The curves are shown considering the anti-spring mechanisms with different G while keeping t, w, and l constant. d Normalized minimum stiffness–maximum axis force curves for the anti-spring mechanism

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