Table 2 The dimensions of the proposed accelerometer
From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
Parameters | Value |
|---|---|
Width of the proof mass | 930 μm |
Length of the proof mass | 2450 μm |
Capacitor gap | 2 μm |
Total mass | 138 μg |
Die area | 4.2 mm × 4.9 mm |
