Fig. 4: Temperature attenuation and temperature compensation. | Microsystems & Nanoengineering

Fig. 4: Temperature attenuation and temperature compensation.

From: Theoretical and experimental investigations of the CMOS compatible Pirani gauges with a temperature compensation model

Fig. 4: Temperature attenuation and temperature compensation.

a Test results and theoretical model predictions of output range at different ambient temperatures. b Test results and theoretical model predictions at 298 K and 333 K. c Schematic diagram of temperature compensation process. d Temperature compensation based on an ambient temperature of 298 K

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