Fig. 2: The measured and simulated quality factor as a function of shunt capacitance. | Microsystems & Nanoengineering

Fig. 2: The measured and simulated quality factor as a function of shunt capacitance.

From: Putting piezoelectric sensors into Fano resonances

Fig. 2

Extracted parameters of circuit elements for the as-fabricated resonator are used for simulations. They are \({C}_{0}=96.16\,{\rm{pF}}\), \({C}_{m}=1.737\,{\rm{pF}}\), \({L}_{m}=1.616\,{\mu }{\rm{H}}\), and \({R}_{m}=2.994\,{\Omega }\), respectively

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