Fig. 3: The humidity response of the SAW resonator. | Microsystems & Nanoengineering

Fig. 3: The humidity response of the SAW resonator.

From: Putting piezoelectric sensors into Fano resonances

Fig. 3

a, c The measured scattering parameter (S11) as a function of frequency at different humidity levels for Cp = 0 and Cp = 39 pF, respectively. b, d The measured resonant frequency shift as a function of relative humidity for Cp = 0 and Cp = 39 pF, respectively. Cp = 0 in (a, b) corresponds to the as-fabricated resonator. Adsorption: the humidity level increases from 30% RH to 90% RH. Desorption: the humidity level decreases from 90% RH to 30% RH

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