Fig. 1: State-of-the-art and 3-axis pyramid device.
From: Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation
a Our novel pyramid Hall device. b A standard 3-axis Hall sensor, composed of one planar Hall device and two vertical Hall devices. c The flat 8-contact Hall device, proposed by Schott9. d Sander’s hexagonal prism Hall device11. e An IMC Hall device12. f SEM image of the pyramid device, with a tilting angle of 30°. g SEM image of the pyramid device, with no tilting angle. h Optical microscope image of the sensor. The pyramid size and the contact dimensions are highlighted in the picture
