Fig. 1: Schematic illustration of the ultra-sensitive μ-TED for airflow detection. | Microsystems & Nanoengineering

Fig. 1: Schematic illustration of the ultra-sensitive μ-TED for airflow detection.

From: Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection

Fig. 1

a The practicality picture and 3D visualization of the μ-TED. b The 2nH changes with diameter D and thickness H of TE elements. Here, 2nH represents the total length of the thermoelectric legs per unit area. c Airflow sensing simulation of μ-TED with different TE element diameters. d Airflow sensing simulation of μ-TED with different TE element thickness

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