Fig. 7: Dynamic performance and temperature vibration coupling testing of the 4H-SiC pressure sensors. | Microsystems & Nanoengineering

Fig. 7: Dynamic performance and temperature vibration coupling testing of the 4H-SiC pressure sensors.

From: Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments

Fig. 7: Dynamic performance and temperature vibration coupling testing of the 4H-SiC pressure sensors.The alt text for this image may have been generated using AI.

a Setup of dynamic pressure test of shock tube. b Time domain response curve. Inset: enlarged display for rise time of the 4H-SiC pressure sensor. c Frequency domain response curve. d Setup of vibration and high-temperature coupling test. e The power spectral density (PSD) map of the input vibration excitation. f Working lines of the 4H-SiC pressure sensor of before and after being affected by vibration and temperature coupling loads. Inset: enlarged view for working lines

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