Fig. 7: Dynamic performance and temperature vibration coupling testing of the 4H-SiC pressure sensors.

a Setup of dynamic pressure test of shock tube. b Time domain response curve. Inset: enlarged display for rise time of the 4H-SiC pressure sensor. c Frequency domain response curve. d Setup of vibration and high-temperature coupling test. e The power spectral density (PSD) map of the input vibration excitation. f Working lines of the 4H-SiC pressure sensor of before and after being affected by vibration and temperature coupling loads. Inset: enlarged view for working lines