Fig. 4: The open-loop test results of the MEMS FSM. | Microsystems & Nanoengineering

Fig. 4: The open-loop test results of the MEMS FSM.

From: A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links

Fig. 4

a Resonant frequency of two axes; b tilting angle linearity of two axes at full scale (±110 V); c angular resolution at 16.5 mV each step; d angular resolution at 13.75 mV each step; e two-dimensional sweep repeatability; f repeatability of zero position of two axes; g tilting angle repeatability of two axes; h step response of two axes; i maximum operational bandwidth; and j tilting angle stability of two axes

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