Fig. 5: The test results of the PZR sensor. | Microsystems & Nanoengineering

Fig. 5: The test results of the PZR sensor.

From: A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links

Fig. 5

a Linearity of piezoresistive sensor at half scale ( ± 55 V); b synchronism of mechanical angle and the output voltage of piezoresistive sensor; c piezoresistive output stability; d angular resolution of the PZR sensor at 16.5 mV each step of FSM; and e angular resolution of the PZR sensor at 11 mV each step of FSM

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