Fig. 3: Schematic diagram and FEM simulation results of the layout design with DMR structure.
From: Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators
Schematic diagram of the layout design with DMR structure (a). Different driving forces can be applied by the currents in two sets of coils in different directions (b); Vibration modes in the X, Y, and Z directions of the actuator with DMR structure under thicknesses of 50 μm (c) and 500 μm (e), respectively; vibration modes in the X, Y, and Z directions of the actuator without DMR structure under thicknesses of 50 μm (d) and 500 μm (f), respectively; comparative stiffness diagram in the X, Y, and Z directions of the actuator with and without DMR structure (g); comparative vibration frequency diagram in the X, Y, and Z directions of the actuator with and without DMR structure (h)
