Fig. 7: Static test results of the actuator.
From: Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators
Stroke test results of the actuator in the X-direction. a and Y-direction (b); in-plane (c) and out-of-plane (d) stiffness test results of the actuator; additional out-of-plane stiffness under different Y coordinates on the micro-motion platform of the MEMS elastic frame with/without the DMR structure (e)
