Table 4 Parameters of laser trimming
From: Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators
Parameter name | Value |
|---|---|
Wave length | 515 nm |
Pulse width | 477 fs |
Scan speed | 1 m/s |
Laser frequency repetition | 1400 kHz |
Beam spot diameter | 10 μm |
Laser power | 5.8 W |
Structure thickness | 300 μm |
