Table 1 Dose definition parameters
Dose i | Dose ii | Dose iii | |
|---|---|---|---|
Power frequency | 13.56 MHz | ||
Discharge intensity | 1.99 W/cm2 | ||
Dielectric barrier | Quarts (0.5 mm in thick) | ||
Discharge distance | 1.5 mm | ||
Gas flow rate | 165 mL/min (0.04Q) | 261 mL/min (0.065Q) | 286 mL/min (0.07Q) |
Gas mixture | Helium/Nitrogen (0.2%) | ||
Treatment duration | 1 min | ||