Fig. 1
The resonant frequency and spring constant were simulated for a rectangular cantilever using COMSOL Multiphysics with dimensions of 120 μm in length, 30 μm in width, and 3 μm in thickness
Fig. 1 | Microsystems & Nanoengineering
The resonant frequency and spring constant were simulated for a rectangular cantilever using COMSOL Multiphysics with dimensions of 120 μm in length, 30 μm in width, and 3 μm in thickness
