Fig. 4: Characterization of the co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves.

a The assembled vector hydrophone and test platform schematic diagram b The origin sensitivity curve with different via spacing. c Sensitivity curve with negative feedback. d Directivity curve@70 Hz. e Noise level. f Functional testing @10 Hz after simulating underwater conditions treatment. g Functional testing @100 Hz after simulating underwater conditions treatment