Fig. 1: Structure of the fabricated RuO2 nanosheets-functionalized SnO2 thin-film gas sensor. | Microsystems & Nanoengineering

Fig. 1: Structure of the fabricated RuO2 nanosheets-functionalized SnO2 thin-film gas sensor.

From: Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets

Fig. 1

a Schematic of the fabricated sensor platform (2.25 × 2.25 mm2). The sensor platform was manufactured through a batch fabrication process, including chemical vapor deposition, e-beam evaporation, inductively coupled plasma etching, photolithography, and silicon wet-etching steps to form a suspended structure. b SEM image of the fabricated RuO2 nanosheets-functionalized SnO2 thin-film ethanol gas sensor showing the RuO2 nanosheets coated SnO2 thin-film surface. RuO2 nanosheets-functionalized SnO2 thin film electrically connects the initially insulated sensor electrodes

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