Fig. 5: Selectivity, humidity resistance, and long-term stability of the RuO2-functionalized sensor.

a Normalized response of the sensor to 10 ppm ethanol under varying relative humidity conditions. During the humidity-controlled experiments, the ambient temperature inside the quartz tube was 21.2 ± 1.0 °C. b Sensor responses to various gases, including toluene, acetone, NH3, NO2, and CO, all at a concentration of 10 ppm. c Long-term stability of the sensor. The experiments were conducted at 7-day intervals. All experiments in (a−c) were performed using the microheater-integrated sensor positioned in a quartz tube at room temperature. The average operating temperature of the micro heater in all experiments was 290 °C