Fig. 2: Sensor pressure measurement.

a Simulation, experimental, and fitting curve results in the 0–1.1 MPa pressure range. b Comparison of initial experimental results with those after three months, along with the deviation, in the 0–1.1 MPa pressure range. c Simulation, experimental, and fitting curve results in the 0–20 MPa pressure range. d Comparison of initial experimental results with those after three months, along with the deviation, in the 0–20 MPa pressure range. e Repetition tests of the sensor at 1.1 MPa pressure. f Capacitance response experimental results under 0–20 MPa pressure range for three sensors (A, B, C) manufactured from the same wafer. g Linearity and sensitivity for 0–20 MPa range segments