Fig. 4: CMUT structural pressure sensor cell simulation. | Microsystems & Nanoengineering

Fig. 4: CMUT structural pressure sensor cell simulation.

From: Dual-mode CMUT structure sensor for high hydrostatic pressure measurements: conventional and collapse modes

Fig. 4

a Pressure vs. Capacitance response of a CMUT sensor for 3 different radii values. b R Pressure vs. Capacitance response of a CMUT sensor for 3 different membrane thickness values. c Pressure vs. Capacitance response of a CMUT sensor for 3 different gap values. d Deflection of the membrane in the pressure range of 0–0.5 MPa. e Deflection of the membrane in the pressure range of 0–30 MPa. f Capacitive response over a pressure range of 0–30 MPa. g Deflection of the sensor membrane under standard atmospheric pressure. h Membrane stresses under a pressure of 0.5 MPa (Conventional mode). i Membrane stresses under a pressure of 20 MPa (Collapse mode)

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