Table 1 Linearity and Sensitivity

From: Dual-mode CMUT structure sensor for high hydrostatic pressure measurements: conventional and collapse modes

Pressures (MPa)

0–0.5

0.5–1.1

1.1–2

2–5

5–10

10–20

MNE (%)

4.2

5.4

3.6

4.6

4.08

5.8

Sensitivity (pF/MPa)

11.69

35.55

15.4

8.99

4.1

1.78

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