Table 2 Other Relevant Studies

From: Dual-mode CMUT structure sensor for high hydrostatic pressure measurements: conventional and collapse modes

Reference

Figure

Type

Packaging

Size

Pressure (MPa)

Mengru Jiao et al.27

Piezoresistive

Polyimide

1.5 × 1.5 × 0.8 mm3

5

Aravamudhan et al.16

Piezoresistive

Pyrex glass

1.5 × 1.5 × 0.5 cm3

7

Xiang Chao et al.28

Resonator

Steel shell

2.5 × 2.5 × 3 cm3

7

Jie Yu et al.15

Resonator

Steel shell

3 × 3 × 4 cm3

70

Haijun Wang et al.17

Capacitive (3-D printed)

Silicone adhesive

3 × 3 × 5 cm3

100

This work

Capacitive (MEMS)

PDMS

2.9 × 1.8 × 0.5 mm3

20