Fig. 3: The analytical simulation results of the PMUT.
From: High frame rate ultrasonic flowmeter based on PMUT array with bidirectional acoustic beams
a The mechanical deflection of the 31-mode PMUT given by finite element model (FEM), side view. b The mechanical deflection of the 31-mode PMUT given by FEM, top view. c The equivalent circuit model (ECM) of the PMUT. d The vibration velocity simulation results given by both the ECM and FEM methods. e The electrical impedance simulation results of a single PMUT cell. f The electrical impedance simulation results of a PMUT channel
