Fig. 2: Characterization of the suspended monolayer MoS2 NEMS resonator array fabricated by the MTP process. | Microsystems & Nanoengineering

Fig. 2: Characterization of the suspended monolayer MoS2 NEMS resonator array fabricated by the MTP process.

From: Functional 2D MoS2 NEMS resonator array with independent electronic tunability based on mass transfer printing

Fig. 2: Characterization of the suspended monolayer MoS2 NEMS resonator array fabricated by the MTP process.The alternative text for this image may have been generated using AI.

Optical images at magnifications of (a) 20×, (b) 50×, and (c) 100×, with scale bars of 100 μm, 40 μm, and 20 μm, respectively. d Representative Raman spectra from suspended regions over microtrenches (red) and substrate-supported regions (blue) of the transferred monolayer MoS₂. Statistics of the (e) Raman peak positions, and (f) FWHM values for the A1g (blue) and E2g¹ (orange) modes for 63 devices, with the long bar and red hexagon representing the average and median, respectively. g Representative photoluminescence (PL) spectrum from suspended regions over trenches (red) and substrate-supported regions (blue) of MoS₂. h Summary of FWHM values for the dominant PL peak across the 63 devices. i AFM topology measurement of a suspended MoS₂ membrane over the microtrench, with the substrate, material edge, device edge, and membrane dip in the suspended region labeled. Scale bar: 2 μm

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