Fig. 3: Structural characterization of critical positions for the MISS. | Microsystems & Nanoengineering

Fig. 3: Structural characterization of critical positions for the MISS.

From: Wide field of view multifunctional solar sensor for photovoltaic power management via measurement of solar angle and intensity

Fig. 3

The SEM images of a the corresponding position between the isolation channel and inclined surface, b the isolation channel, c, d metal over the p-n junction and silicon nitride isolation forming the metal connections and wire pads. e I-V curve of the fabricated photodiode under different illuminations

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